Achieving High-resolution of Large Specimens Using Aberration-corrected Tomography

tomography
Author

R. Yalisove, S. H. Sung, J. Schwartz, C. Groschner, P. Pelz, H. Zheng, Y. Jiang, C. Ophus, M. Scott, P. Ercius, R. Hovden

Doi
Keywords

Tomography

Citation (APA 7)

Achieving High-resolution of Large Specimens Using Aberration-corrected Tomography R. Yalisove, S. H. Sung, J. Schwartz, C. Groschner, P. Pelz, H. Zheng, Y. Jiang, C. Ophus, M. Scott, P. Ercius, R. Hovden Microscopy and Microanalysis 26, 1860-1862

Abstract

Aberration-corrected electron microscopy can resolve the smallest atomic bond-lengths in nature [1-3]. However, the high-convergence angles that enable spectacular resolution in 2D can only achieve limited 3D atomic resolution for all but the smallest objects (c.a. 5 - 10 nm). We show aberration-corrected electron tomography can offer new limits to 3D imaging by sampling several focal planes at each specimen tilt. We present a theoretical foundation for aberration-corrected electron tomography by establishing analytic descriptions for resolution, sampling, object size, and dose—with direct analogy to the Crowther-Klug criterion. 2D resolving power to 3D objects >